- 【Updated on May 12, 2025】 Integration of CiNii Dissertations and CiNii Books into CiNii Research
- Trial version of CiNii Research Knowledge Graph Search feature is available on CiNii Labs
- 【Updated on June 30, 2025】Suspension and deletion of data provided by Nikkei BP
- Regarding the recording of “Research Data” and “Evidence Data”
Fabrication of Amorphous Silicon Carbide Films from Decomposition of Tetramethylsilane using ECR plasma of Ar
Bibliographic Information
- Title
- Fabrication of Amorphous Silicon Carbide Films from Decomposition of Tetramethylsilane using ECR plasma of Ar
- Author
- H. Ito, S. Onitsuka, R. Gappa, H. Saitoh, R. Roacho, K. H. Pannell, T. Suzuki, M. Niibe,and K. Kanda
Journal
-
- J. Phys. Conf. Ser.
-
J. Phys. Conf. Ser. (印刷中)
- Tweet
Details 詳細情報について
-
- CRID
- 1010282257097332992
-
- Web Site
- http://iopscience.iop.org/1742-6596/
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN