Magnetic Field-Assisted Finishing of Silicon Microelectromechanical Systems Micropore X-ray Optics
書誌事項
- タイトル
- Magnetic Field-Assisted Finishing of Silicon Microelectromechanical Systems Micropore X-ray Optics
- 著者
- R.E. Riveros、I. Mitsuishi、U. Takagi、Y. Ezoe、K. Mitsuda、H. Yamaguchi、T. Boggs、K. Ishizu、T. Moriyama
収録刊行物
-
- J. Manufacturing Science and Engineering
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J. Manufacturing Science and Engineering 134 51001-, 2012