[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Magnetic Field-Assisted Finishing of Silicon Microelectromechanical Systems Micropore X-ray Optics

Bibliographic Information

Title
Magnetic Field-Assisted Finishing of Silicon Microelectromechanical Systems Micropore X-ray Optics
Author
R.E. Riveros、I. Mitsuishi、U. Takagi、Y. Ezoe、K. Mitsuda、H. Yamaguchi、T. Boggs、K. Ishizu、T. Moriyama

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Details

  • CRID
    1010282257154961282
  • Article Type
    journal article
  • Data Source
    • KAKEN

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