[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Technique for preparing defect-free spray coated resist-film on three-dimensional micro-electromecanical systems

Bibliographic Information

Title
Technique for preparing defect-free spray coated resist-film on three-dimensional micro-electromecanical systems
Author
V.K.Singh, M.Sasaki, J.-H.Song, K.Hane

Journal

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Details

  • CRID
    1010282257407551242
  • Article Type
    journal article
  • Data Source
    • KAKEN

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