Technique for preparing defect-free spray coated resist-film on three-dimensional micro-electromecanical systems
書誌事項
- タイトル
- Technique for preparing defect-free spray coated resist-film on three-dimensional micro-electromecanical systems
- 著者
- V.K.Singh, M.Sasaki, J.-H.Song, K.Hane
収録刊行物
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- Jpn. J. Appl. Phys vol. 44
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Jpn. J. Appl. Phys vol. 44 2016-2020, 2005
