Room-Temperature Epitaxial Growth of High Quality AIN on SiC by Pulsed Sputtering Deposition

Bibliographic Information

Title
Room-Temperature Epitaxial Growth of High Quality AIN on SiC by Pulsed Sputtering Deposition
Author
K. Sato

Journal

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Details 詳細情報について

  • CRID
    1010282257417758491
  • Article Type
    journal article
  • Data Source
    • KAKEN

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