Room-Temperature Epitaxial Growth of High Quality AIN on SiC by Pulsed Sputtering Deposition
書誌事項
- タイトル
- Room-Temperature Epitaxial Growth of High Quality AIN on SiC by Pulsed Sputtering Deposition
- 著者
- K. Sato
収録刊行物
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- Appl. Phys. Exp 2
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Appl. Phys. Exp 2 11003-, 2009