Porosity Control of Nano-particle Composite Porous Low Dielectric Films using Pulse RF Discharges with Amplitude Modulation
Bibliographic Information
- Title
- Porosity Control of Nano-particle Composite Porous Low Dielectric Films using Pulse RF Discharges with Amplitude Modulation
- Author
- Shinya Iwashita, Hiroshi Miyata, Kazunori Koga, Hidefumi Matsuzaki, Masaharu Shiratani, Morita Akiyama
Journal
-
- Proceedings of Dry Process International Symposium
-
Proceedings of Dry Process International Symposium 99-100, 2009
- Tweet
Details 詳細情報について
-
- CRID
- 1010282257430724608
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN