Porosity Control of Nano-particle Composite Porous Low Dielectric Films using Pulse RF Discharges with Amplitude Modulation
書誌事項
- タイトル
- Porosity Control of Nano-particle Composite Porous Low Dielectric Films using Pulse RF Discharges with Amplitude Modulation
- 著者
- Shinya Iwashita, Hiroshi Miyata, Kazunori Koga, Hidefumi Matsuzaki, Masaharu Shiratani, Morita Akiyama
収録刊行物
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- Proceedings of Dry Process International Symposium
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Proceedings of Dry Process International Symposium 99-100, 2009