[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Impact of InGaAs surface nitridation on interface properties of InGaAs metal-oxide-semiconductor capacitors using electron cyclotron resonance plasma sputtering SiO2

Bibliographic Information

Title
Impact of InGaAs surface nitridation on interface properties of InGaAs metal-oxide-semiconductor capacitors using electron cyclotron resonance plasma sputtering SiO2
Author
Takuya Hoshii

Journal

Related Projects

See more

Details

  • CRID
    1010282257459106944
  • Article Type
    journal article
  • Data Source
    • KAKEN

Report a problem

Back to top