Patterning-Area Expansion of Parabolic-Mirror Projection Optics for Lithography Using One-Sided and Collimated Illumination
オープンアクセス
書誌事項
- タイトル
- Patterning-Area Expansion of Parabolic-Mirror Projection Optics for Lithography Using One-Sided and Collimated Illumination
- 著者
- Toshiyuki Horiuchi、Jun-ya Iwasaki、Hiroshi Kobayashi
収録刊行物
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- IOSR Journal of Applied PHysics
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IOSR Journal of Applied PHysics 14(5)Series-2 12-20, 2022