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Reduction of threading dislocation density and suppression of cracking in sputter-deposited AlN templates annealed at high temperatures
Bibliographic Information
- Title
- Reduction of threading dislocation density and suppression of cracking in sputter-deposited AlN templates annealed at high temperatures
- Author
- Kenjiro Uesugi, Yusuke Hayashi, Kanako Shojiki, Hideto Miyake
Journal
-
- Appl. Phys. Express
-
Appl. Phys. Express 12 2019
- Tweet
Details 詳細情報について
-
- CRID
- 1011975830715923072
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
