Reduction of threading dislocation density and suppression of cracking in sputter-deposited AlN templates annealed at high temperatures
書誌事項
- タイトル
- Reduction of threading dislocation density and suppression of cracking in sputter-deposited AlN templates annealed at high temperatures
- 著者
- Kenjiro Uesugi, Yusuke Hayashi, Kanako Shojiki, Hideto Miyake
収録刊行物
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- Appl. Phys. Express
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Appl. Phys. Express 12 2019
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詳細情報
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- CRID
- 1011975830715923072
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- 資料種別
- journal article
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- データソース種別
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- KAKEN