Effects of amplitude modulated discharge on growth of nanoparticles in TEOS/O2/Ar capacitively coupled plasma

IR (HANDLE) Open Access
  • Kamataki, Kunihiro
    Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University
  • Nagamatsu, Daiki
    Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University
  • Yang, Tao
    Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University
  • Abe, Kohei
    Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University
  • Yamamoto, Akihiro
    Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University
  • Nagao, Iori
    Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University
  • Arima, Toshiaki
    Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University
  • Otaka, Michihiro
    Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University
  • Yamamoto, Yuma
    Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University
  • Yamashita, Daisuke
    Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University
  • Okumura, Takamasa
    Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University
  • Yamashita, Naoto
    Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University
  • Itagaki, Naho
    Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University
  • Koga, Kazunori
    Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University National Institutes of Natural Sciences
  • Shiratani, Masaharu
    Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University

Journal

  • AIP Advances

    AIP Advances 12 (8), 2022-08-01

    AIP Publishing

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Keywords

Details 詳細情報について

  • CRID
    1050863860427764224
  • ISSN
    21583226
  • HANDLE
    2324/7160831
  • Text Lang
    en
  • Article Type
    journal article
  • Data Source
    • IRDB

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