Effects of amplitude modulated discharge on growth of nanoparticles in TEOS/O2/Ar capacitively coupled plasma

  • Kamataki, Kunihiro
    Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University
  • Nagamatsu, Daiki
    Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University
  • Yang, Tao
    Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University
  • Abe, Kohei
    Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University
  • Yamamoto, Akihiro
    Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University
  • Nagao, Iori
    Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University
  • Arima, Toshiaki
    Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University
  • Otaka, Michihiro
    Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University
  • Yamamoto, Yuma
    Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University
  • Yamashita, Daisuke
    Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University
  • Okumura, Takamasa
    Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University
  • Yamashita, Naoto
    Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University
  • Itagaki, Naho
    Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University
  • Koga, Kazunori
    Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University National Institutes of Natural Sciences
  • Shiratani, Masaharu
    Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University

説明

<jats:p>We investigate the effects of the amplitude modulation (AM) discharge method on the growth of nanoparticles and the relation between growth of nanoparticles and plasma generation in tetraethylorthosilicate (TEOS)/O2/Ar plasma. The laser-light scattering (LLS) intensity, which is proportional to the density and the sixth power of the size of nanoparticles in the Rayleigh scattering regime, decreases by 18% at an AM level of 10% and by 60% at an AM level of 50%. On the other hand, the ArI emission intensity, which is roughly proportional to plasma density, is higher than that for the continuous wave discharge. Thus, AM discharges suppress growth of nanoparticles in TEOS plasma. We have shown oscillations of the axial electric field Ez with the AM frequency for AM discharge by electric field measurement using an electro-optic probe. We have discussed that these fluctuations of Ez mainly lead to the vertical oscillation of the levitation position of nanoparticles trapped in the plasma sheath boundary region by taking into account the force balance equation in the axial direction on these negatively charged nanoparticles.</jats:p>

収録刊行物

  • AIP Advances

    AIP Advances 12 (8), 085220-, 2022-08-01

    AIP Publishing

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