Effects of amplitude modulated discharge on growth of nanoparticles in TEOS/O2/Ar capacitively coupled plasma

Kamataki, Kunihiro, Nagamatsu, Daiki, Yang, Tao, Abe, Kohei, Yamamoto, Akihiro, Nagao, Iori, Arima, Toshiaki, Otaka, Michihiro, Yamamoto, Yuma, Yamashita, Daisuke, Okumura, Takamasa, Yamashita, Naoto, Itagaki, Naho, Koga, Kazunori, Shiratani, Masaharu

Effects of amplitude modulated discharge on growth of nanoparticles in TEOS/O2/Ar capacitively coupled plasma

機関リポジトリ (HANDLE) オープンアクセス

Kamataki, Kunihiro

Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University
Nagamatsu, Daiki

Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University
Yang, Tao

Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University
Abe, Kohei

Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University
Yamamoto, Akihiro

Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University
Nagao, Iori

Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University
Arima, Toshiaki

Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University
Otaka, Michihiro

Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University
Yamamoto, Yuma

Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University
Yamashita, Daisuke

Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University
Okumura, Takamasa

Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University
Yamashita, Naoto

Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University
Itagaki, Naho

Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University
Koga, Kazunori

Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University National Institutes of Natural Sciences
Shiratani, Masaharu

Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University