Plasma processing : proceedings of the Symposium on Plasma Etching and Deposition
Bibliographic Information
- Title
- "Plasma processing : proceedings of the Symposium on Plasma Etching and Deposition"
- Statement of Responsibility
- edited by R.G. Frieser, C.J. Mogab ; [sponsored by] Dielectrics and Insulation and Electronics Divisions
- Publisher
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- Electrochemical Society
- Publication Year
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- c1981
- Book size
- 23 cm
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Notes
Includes bibliographical references and indexes
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Details 詳細情報について
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- CRID
- 1130000794222815744
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- NII Book ID
- BA88926207
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- LCCN
- 81065237
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- Web Site
- https://lccn.loc.gov/81065237
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Pennington, NJ (10 South Main St., Pennington 08534)
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- Classification
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- LCC: TK7871.85
- DC19: 621.3815/2
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- Subject
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- Data Source
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- CiNii Books
