Metal impurities in silicon- and germanium-based technologies : origin, characterization, control, and device impact
Bibliographic Information
- Title
- "Metal impurities in silicon- and germanium-based technologies : origin, characterization, control, and device impact"
- Statement of Responsibility
- Cor Claeys, Eddy Simoen
- Publisher
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- Springer
- Publication Year
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- c2018
- Book size
- 25 cm
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Notes
Includes bibliographical references and index
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Details 詳細情報について
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- CRID
- 1130000794303041408
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- NII Book ID
- BB27640161
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- ISBN
- 9783319939247
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- LCCN
- 2018945881
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- Web Site
- https://lccn.loc.gov/2018945881
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- Text Lang
- en
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- Country Code
- sz
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- Title Language Code
- en
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- Place of Publication
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- Cham, Switzerland
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- Classification
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- DC23: 620.1/6
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- Subject
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- LCSH: Materials science
- LCSH: Metals -- Inclusions
- LCSH: Semiconductors -- Materials
- LCSH: Optical materials
- LCSH: Microwaves
- LCSH: Surfaces (Physics)
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- Data Source
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- CiNii Books
