Chemical-mechanical planarization of semiconductor materials
Bibliographic Information
- Title
- "Chemical-mechanical planarization of semiconductor materials"
- Statement of Responsibility
- M.R. Oliver (ed.)
- Publisher
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- Springer
- Publication Year
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- c2004
- Book size
- 24 cm
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Notes
Includes bibliographical references and index
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Details 詳細情報について
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- CRID
- 1130000794310533888
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- NII Book ID
- BA65818089
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- ISBN
- 3540431810
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- LCCN
- 2003059075
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- Web Site
- https://lccn.loc.gov/2003059075
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- Text Lang
- en
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- Country Code
- gw
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- Title Language Code
- en
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- Place of Publication
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- Berlin ; Tokyo
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- Classification
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- LCC: TK7871.85
- DC22: 621.3815/2
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- Subject
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- LCSH: Semiconductors -- Materials
- LCSH: Grinding and polishing
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- Data Source
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- CiNii Books