Integrated circuit metrology, inspection, and process control VIII : 28 February-2 March [1994], San Jose, California

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Bibliographic Information

Title
"Integrated circuit metrology, inspection, and process control VIII : 28 February-2 March [1994], San Jose, California"
Statement of Responsibility
Marylyn Hoy Bennett chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering
Publisher
  • SPIE
Publication Year
  • c1994
Book size
28 cm

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Notes

Includes bibliographical references and index

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Details 詳細情報について

  • CRID
    1130000794313370752
  • NII Book ID
    BA27423916
  • ISBN
    0819414913
  • LCCN
    94065791
  • Web Site
    https://lccn.loc.gov/94065791
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Bellingham, Wash., USA
  • Data Source
    • CiNii Books
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