Micromachined devices and components II : 14-15 October 1996, Austin, Texas
Bibliographic Information
- Title
- "Micromachined devices and components II : 14-15 October 1996, Austin, Texas"
- Statement of Responsibility
- Kevin Chau, Ray M. Roop, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute for Standards and Technology
- Publisher
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- SPIE
- Publication Year
-
- 1996
- Book size
- 28 cm
- Series Name / No
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- pbk.
- Other Title
-
- Micromachined devices and components 2
- Micromachined devices and components two
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Notes
Includes bibliographical references and index
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Details 詳細情報について
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- CRID
- 1130000794430314496
-
- NII Book ID
- BA79657206
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- ISBN
- 0819422800
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- LCCN
- 96069476
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- Web Site
- https://lccn.loc.gov/96069476
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- Text Lang
- en
-
- Country Code
- us
-
- Title Language Code
- en
-
- Place of Publication
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- Bellingham, WA
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- Classification
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- LCC: TJ163
- DC21: 621.3815/2
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- Subject
-
- Data Source
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- CiNii Books