Film deposition by plasma techniques

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Bibliographic Information

Title
"Film deposition by plasma techniques"
Statement of Responsibility
Mitsuharu Konuma
Publisher
  • Springer-Verlag
Publication Year
  • c1992
Book size
24 cm
Series Name / No
  • : Germany
  • : New York
Other Title
  • プラズマと成膜の基礎

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Notes

Based on: Purazuma to seimaku no kiso / Mitsuharu Konuma. Cf. Pref

Includes bibliographical references and index

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