Film deposition by plasma techniques
CiNii
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Bibliographic Information
- Title
- "Film deposition by plasma techniques"
- Statement of Responsibility
- Mitsuharu Konuma
- Publisher
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- Springer-Verlag
- Publication Year
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- c1992
- Book size
- 24 cm
- Series Name / No
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- : Germany
- : New York
- Other Title
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- プラズマと成膜の基礎
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Notes
Based on: Purazuma to seimaku no kiso / Mitsuharu Konuma. Cf. Pref
Includes bibliographical references and index
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Details 詳細情報について
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- CRID
- 1130000794508741760
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- NII Book ID
- BA14397573
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- ISBN
- 3540540571
- 0387540571
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- Text Lang
- en
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- Country Code
- gw
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- Title Language Code
- en
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- Place of Publication
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- Berlin ; Tokyo
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- Classification
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- LCC: TK7871.15.F5
- DC20: 621.381/52
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- Subject
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- LCSH: Thin films
- LCSH: Plasma-enhanced chemical vapor deposition
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- Data Source
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- CiNii Books