Design and process integration for microelectronic manufacturing II [sic] : 26-27 February 2004, Santa Clara, California, USA

Web Site CiNii 所蔵館 1館

書誌事項

タイトル
"Design and process integration for microelectronic manufacturing II [sic] : 26-27 February 2004, Santa Clara, California, USA"
責任表示
Lars W. Liebmann, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] International SEMATECH
出版者
  • SPIE
出版年月
  • c2004
書籍サイズ
28 cm
タイトル別名
  • Design and process integration for microelectronic manufacturing III

この図書・雑誌をさがす

注記

2004 conference is the third conference in the series

Includes bibliographical references and index

関連図書・雑誌

もっと見る

詳細情報 詳細情報について

ページトップへ