Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia

Name: Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia
Author: Device and Process Technologies for MEMS, Microelectronics, and Photonics (Conference), Chiao, Jung-Chih, Society of Photo-optical Instrumentation Engineers, University of Western Australia, Defence Science and Technology Organisation (Australia)

Device and Process Technologies for MEMS, Microelectronics, and Photonics (Conference), Chiao, Jung-Chih, Society of Photo-optical Instrumentation Engineers, University of Western Australia, Defence Science and Technology Organisation (Australia)

Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia

Web Site CiNii Available at 1 libraries

Device and Process Technologies for MEMS, Microelectronics, and Photonics (Conference)
Chiao, Jung-Chih
Society of Photo-optical Instrumentation Engineers
University of Western Australia
Defence Science and Technology Organisation (Australia)

Bibliographic Information

Title: "Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia"

Statement of Responsibility: Jung-Chih Chiao ... [et al.], chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cosponsored by the University of Western Australia (Australia) [and] Defence Science and Technology (Australia)

Publisher

SPIE

Publication Year

c2004

Book size: 28 cm

Other Title

Device and process technologies for MEMS and microelectronics

Search this Book/Journal

NDL Search
Calil
WorldCat

Notes

Includes bibliographical references and index

Related Books

Details 詳細情報について

Export