Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia

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書誌事項

タイトル
"Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia"
責任表示
Jung-Chih Chiao ... [et al.], chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cosponsored by the University of Western Australia (Australia) [and] Defence Science and Technology (Australia)
出版者
  • SPIE
出版年月
  • c2004
書籍サイズ
28 cm
タイトル別名
  • Device and process technologies for MEMS and microelectronics

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Includes bibliographical references and index

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