Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA
書誌事項
- タイトル
- "Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA"
- 責任表示
- Alexander Starikov, Kenneth W. Tobin, Jr., chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
- 出版者
-
- SPIE
- 出版年月
-
- c2002
- 書籍サイズ
- 28 cm
この図書・雑誌をさがす
注記
Includes bibliographical references and index
- Tweet
詳細情報 詳細情報について
-
- CRID
- 1130000794985876480
-
- NII書誌ID
- BA86010726
-
- ISBN
- 0819444391
-
- LCCN
- 2002512515
-
- Web Site
- https://lccn.loc.gov/2002512515
-
- 本文言語コード
- en
-
- 出版国コード
- us
-
- タイトル言語コード
- en
-
- 出版地
-
- Bellingham, Wash.
-
- 分類
-
- LCC: TK7874
-
- 件名
-
- LCSH: Integrated circuits -- Design and construction -- Congresses
- LCSH: Integrated circuits -- Defects -- Analysis -- Congresses
- LCSH: Semiconductors -- Characterization -- Congresses
- LCSH: Semiconductor wafers -- Defects -- Analysis -- Congresses
- LCSH: Microelectronics industry -- Quality control -- Congresses
- LCSH: Quality control -- Congresses
-
- データソース種別
-
- CiNii Books