Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA
Bibliographic Information
- Title
- "Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA"
- Statement of Responsibility
- Alexander Starikov, Kenneth W. Tobin, Jr., chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
- Publisher
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- SPIE
- Publication Year
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- c2002
- Book size
- 28 cm
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Notes
Includes bibliographical references and index
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Details 詳細情報について
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- CRID
- 1130000794985876480
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- NII Book ID
- BA86010726
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- ISBN
- 0819444391
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- LCCN
- 2002512515
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- Web Site
- https://lccn.loc.gov/2002512515
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Wash.
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- Classification
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- LCC: TK7874
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- Subject
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- LCSH: Integrated circuits -- Design and construction -- Congresses
- LCSH: Integrated circuits -- Defects -- Analysis -- Congresses
- LCSH: Semiconductors -- Characterization -- Congresses
- LCSH: Semiconductor wafers -- Defects -- Analysis -- Congresses
- LCSH: Microelectronics industry -- Quality control -- Congresses
- LCSH: Quality control -- Congresses
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- Data Source
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- CiNii Books