Metal impurities in silicon-device fabrication

CiNii Available at 11 libraries

Bibliographic Information

Title
"Metal impurities in silicon-device fabrication"
Statement of Responsibility
Klaus Graff
Publisher
  • Springer-Verlag
  • 2nd, revised ed.
Publication Year
  • c2000
Book size
24 cm

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Notes

Includes bibliographical references and index

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Details 詳細情報について

  • CRID
    1130000795142190336
  • NII Book ID
    BA46405070
  • ISBN
    3540642137
  • Text Lang
    en
  • Country Code
    gw
  • Title Language Code
    en
  • Place of Publication
    • Berlin ; New York
  • Data Source
    • CiNii Books
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