MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK

CiNii 所蔵館 2館

書誌事項

タイトル
"MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK"
責任表示
Uwe F. W. Behringer, Deepak G. Uttamchandani, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by Scottish Enterprise (UK) ; cooperating organizations, EOS--European Optical Society [and] IEE--the Institution of Electrical Engineers (UK)
出版者
  • SPIE
出版年月
  • c2001
書籍サイズ
28 cm

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Includes bibliographical references and index

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