Optical microlithography : technology for the mid-1980s, March 31-April 1, 1982, Santa Clara, California

Stover, Harry L., Society of Photo-optical Instrumentation Engineers

Optical microlithography : technology for the mid-1980s, March 31-April 1, 1982, Santa Clara, California

Web Site CiNii 所蔵館 5館

書誌事項

タイトル: "Optical microlithography : technology for the mid-1980s, March 31-April 1, 1982, Santa Clara, California"

責任表示: Harry L. Stover, chairman/editor

出版者

SPIE--the International Society for Optical Engineering

出版年月

c1982

書籍サイズ: 28 cm

シリーズ名/番号

pbk.

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注記

"In cooperation with the International Society for Hybrid Microelectronics, the Northern California Microphotomask/Masking Working Group, the Materials Research Society."

Includes bibliographical references and indexes

Optical microlithography : technology for the mid-1980s, March 31-April 1, 1982, Santa Clara, California

書誌事項

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注記

関連図書・雑誌

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書き出し

Optical microlithography : technology for the mid-1980s, March 31-April 1, 1982, Santa Clara, California

書誌事項

この図書・雑誌をさがす

注記

関連図書・雑誌

詳細情報 詳細情報について

書き出し

詳細情報詳細情報について