Bibliographic Information
- Title
- "Selected papers on optical microlithography"
- Statement of Responsibility
- Harry L. Stover, editor
- Publisher
-
- SPIE Optical Engineering Press
- Publication Year
-
- c1992
- Book size
- 28 cm
- Series Name / No
-
- : hardbound
- : softbound
- Other Title
-
- Optical microlithography
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Notes
Papers originally published in various journals, 1974-1991
Includes bibliographical references and index
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Details 詳細情報について
-
- CRID
- 1130000795550357632
-
- NII Book ID
- BA25780639
-
- ISBN
- 0819409855
- 0819409863
-
- LCCN
- 92019421
-
- Web Site
- https://lccn.loc.gov/92019421
-
- Text Lang
- en
-
- Country Code
- us
-
- Title Language Code
- en
-
- Place of Publication
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- Bellingham, Wash.
-
- Classification
-
- LCC: TK7871.85
- DC20: 621.3815/2
-
- Subject
-
- LCSH: Semiconductors -- Design and construction
- LCSH: Microlithography
- LCSH: Masks (Electronics)
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- Data Source
-
- CiNii Books
