Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology
書誌事項
- タイトル
- "Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology"
- 責任表示
- edited by G.R. Srinivasan, K. Taniguchi, C.S. Murthy ; [sponsored by] Electronics Division
- 出版者
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- Electrochemical Society
- 出版年月
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- c1993
- 書籍サイズ
- 23 cm
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注記
"The collection of papers included in this volume were presented at the Third International Symposium on Process Physics and Modeling in Semiconductor Technology held in Honolulu, Hawaii, May 19-21, 1993, as part of the Spring Meeting of the Electrochemical Society."
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詳細情報 詳細情報について
-
- CRID
- 1130000795603065856
-
- NII書誌ID
- BA19907961
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- ISBN
- 1566770645
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- LCCN
- 93070053
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- Web Site
- https://lccn.loc.gov/93070053
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- 本文言語コード
- en
-
- 出版国コード
- us
-
- タイトル言語コード
- en
-
- 出版地
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- Pennington, NJ
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- データソース種別
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- CiNii Books
