Optical metrology roadmap for the semiconductor, optical, and data storage industries II : 2-3 August 2001 San Diego, USA

CiNii Available at 3 libraries

Bibliographic Information

Title
"Optical metrology roadmap for the semiconductor, optical, and data storage industries II : 2-3 August 2001 San Diego, USA"
Statement of Responsibility
Angela Duparré, Bhanwar Singh, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering
Publisher
  • SPIE
Publication Year
  • c2001
Book size
28 cm

Search this Book/Journal

Notes

Includes bibliographic references and index

Related Books

See more

Details 詳細情報について

  • CRID
    1130000795898456832
  • NII Book ID
    BA58045904
  • ISBN
    0819441635
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Bellingham, Wash.
  • Data Source
    • CiNii Books
Back to top