MEMS reliability for critical and space applications : 21-22 September 1999, Santa Clara, California
Bibliographic Information
- Title
- "MEMS reliability for critical and space applications : 21-22 September 1999, Santa Clara, California"
- Statement of Responsibility
- Russell A. Lawton ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, cooperating organizations, SolidState Technology ... [et al.]
- Publisher
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- SPIE
- Publication Year
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- c1999
- Book size
- 28 cm
- Series Name / No
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- pbk.
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Notes
Includes bibliographical references and index
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Details 詳細情報について
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- CRID
- 1130000796110990848
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- NII Book ID
- BA76480734
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- ISBN
- 0819434779
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- LCCN
- 00266575
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- Web Site
- https://lccn.loc.gov/00266575
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Washington
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- Data Source
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- CiNii Books