MEMS reliability for critical and space applications : 21-22 September 1999, Santa Clara, California

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Bibliographic Information

Title
"MEMS reliability for critical and space applications : 21-22 September 1999, Santa Clara, California"
Statement of Responsibility
Russell A. Lawton ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, cooperating organizations, SolidState Technology ... [et al.]
Publisher
  • SPIE
Publication Year
  • c1999
Book size
28 cm
Series Name / No
  • pbk.

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Notes

Includes bibliographical references and index

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