Integrated circuit metrology II : May 3-4, 1984, Arlington, Virginia

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Bibliographic Information

Title
"Integrated circuit metrology II : May 3-4, 1984, Arlington, Virginia"
Statement of Responsibility
Diana Nyyssonen, chairman/editor ; cooperating organization, National Bureau of Standards
Publisher
  • SPIE--the International Society for Optical Engineering
Publication Year
  • c1984
Book size
28 cm
Series Name / No
  • pbk.
Other Title
  • Integrated circuit metrology 2
  • Integrated circuit metrology two

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Notes

Includes bibliographical references and index

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