Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California

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Bibliographic Information

Title
"Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California"
Statement of Responsibility
James H. Smith, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]
Publisher
  • SPIE
Publication Year
  • c1998
Book size
28 cm

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Notes

Includes bibliographical references and author index

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