Gate dielectric integrity : material, process, and tool qualification

CiNii Available at 2 libraries

Bibliographic Information

Title
"Gate dielectric integrity : material, process, and tool qualification"
Statement of Responsibility
Dinesh C. Gupta and George A. Brown, editors
Publisher
  • ASTM
Publication Year
  • c2000
Book size
23 cm

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Notes

Includes bibliographical references

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Details 詳細情報について

  • CRID
    1130000796400078848
  • NII Book ID
    BA45719619
  • ISBN
    0803126158
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • West Conshohocken, PA
  • Data Source
    • CiNii Books
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