Characterization and metrology for ULSI technology : 2003 international conference on characterization and metrology for ULSI technology, Austin, Texas 24-28 March 2003

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Bibliographic Information

Title
"Characterization and metrology for ULSI technology : 2003 international conference on characterization and metrology for ULSI technology, Austin, Texas 24-28 March 2003"
Statement of Responsibility
editors David G. Seiler ... [et al.]
Publisher
  • American Institute of Physics
Publication Year
  • c2003
Book size
28 cm.

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Notes

Includes bibliographical references and index

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Details 詳細情報について

  • CRID
    1130000796435737600
  • NII Book ID
    BA65067689
  • ISBN
    0735401527
  • LCCN
    2003111108
  • Web Site
    https://lccn.loc.gov/2003111108
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Melville, New York
  • Data Source
    • CiNii Books
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