Proceedings of the Second International Symposium on Chemical Mechanical Planariarization [sic] in Integrated Circuit Device Manufacturing

International Symposium on Chemical Mechanical Planarization, Raghavan, S. (Srini), Opila, Robert Leon, Zhang, L., Electrochemical Society. Electronics Division, Electrochemical Society. Dielectric Science and Technology Division, Electrochemical Society. Meeting

Proceedings of the Second International Symposium on Chemical Mechanical Planariarization [sic] in Integrated Circuit Device Manufacturing

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書誌事項

タイトル: "Proceedings of the Second International Symposium on Chemical Mechanical Planariarization [sic] in Integrated Circuit Device Manufacturing"

責任表示: editors, S. Raghavan, R.L. Opila, L. Zhang ; Electronics and Dielectric Science and Technology Divisions [of the Electrochemical Society]

出版者

Electrochemical Society

出版年月

c1998

書籍サイズ: 23 cm

タイトル別名

Chemical mechanical planarization in integrated circuit device manufacturing

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注記

"Electronics and Dielectric Science and Technology Divisions."

"This volume contains most of the papers presented at the Second International Symposium on Chemical Mechanical Planarization (CMP) in Integrated Circuit (IC) Device Manufacturing held at the 193rd Annual Meeting of Electrochemical Society in San Diego during May 5-7, 1998."

Includes bibliographical references and indexes

Proceedings of the Second International Symposium on Chemical Mechanical Planariarization [sic] in Integrated Circuit Device Manufacturing

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Proceedings of the Second International Symposium on Chemical Mechanical Planariarization [sic] in Integrated Circuit Device Manufacturing

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注記

関連図書・雑誌

詳細情報 詳細情報について

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