Ultra clean processing of silicon surfaces : proceedings of the Fourth International Symposium on ultra clean processing of silicon surfaces held in Ostend, Belgium, September 21-23, 1998
CiNii
Available at 4 libraries
Bibliographic Information
- Title
- "Ultra clean processing of silicon surfaces : proceedings of the Fourth International Symposium on ultra clean processing of silicon surfaces held in Ostend, Belgium, September 21-23, 1998"
- Statement of Responsibility
- editors, Marc Heyns, Marc Meuris and Paul Mertens
- Publisher
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- Scitec Publications Ltd
- Publication Year
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- c1999
- Book size
- 25 cm
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Notes
Volumes 65-66 of Solid State Phenomena, ISSN1012-0394
Includes index
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Details 詳細情報について
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- CRID
- 1130000796484709888
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- NII Book ID
- BA46355405
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- ISBN
- 3908450403
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- Text Lang
- en
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- Country Code
- sz
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- Title Language Code
- en
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- Place of Publication
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- Uetikon-Zuerich
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- Data Source
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- CiNii Books