Ultra clean processing of silicon surfaces : proceedings of the Fourth International Symposium on ultra clean processing of silicon surfaces held in Ostend, Belgium, September 21-23, 1998

CiNii Available at 4 libraries

Bibliographic Information

Title
"Ultra clean processing of silicon surfaces : proceedings of the Fourth International Symposium on ultra clean processing of silicon surfaces held in Ostend, Belgium, September 21-23, 1998"
Statement of Responsibility
editors, Marc Heyns, Marc Meuris and Paul Mertens
Publisher
  • Scitec Publications Ltd
Publication Year
  • c1999
Book size
25 cm

Search this Book/Journal

Notes

Volumes 65-66 of Solid State Phenomena, ISSN1012-0394

Includes index

Related Books

See more

Details 詳細情報について

  • CRID
    1130000796484709888
  • NII Book ID
    BA46355405
  • ISBN
    3908450403
  • Text Lang
    en
  • Country Code
    sz
  • Title Language Code
    en
  • Place of Publication
    • Uetikon-Zuerich
  • Data Source
    • CiNii Books
Back to top