Flatness, roughness, and discrete defects characterization for computer disks, wafers, and flat panel displays II : 29-30 January 1998, San Jose, California

CiNii 所蔵館 4館

書誌事項

タイトル
"Flatness, roughness, and discrete defects characterization for computer disks, wafers, and flat panel displays II : 29-30 January 1998, San Jose, California"
責任表示
John C. Stover, chair/editor
出版者
  • Sponsored and published by SPIE-The International Society for Optical Engineering
出版年月
  • c1998
書籍サイズ
28 cm
タイトル別名
  • Flatness, roughness, and discrete defects characterization for computer disks, wafers, and flat panel displays II : 1998 San Jose

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注記

Includes bibliographical references and index

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