Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium
Bibliographic Information
- Title
- "Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium"
- Statement of Responsibility
- editors, F. Roozeboom ... [et al.]
- Publisher
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- Electrochemical Society
- Publication Year
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- c2003-2004
- Book size
- 24 cm
- Series Name / No
-
- [I]
- II
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Notes
Includes bibliographical references and indexes
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Details 詳細情報について
-
- CRID
- 1130000796774101248
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- NII Book ID
- BA69491300
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- ISBN
- 1566773962
- 1566774063
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- LCCN
- 2003110354
- 2004102296
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- Text Lang
- en
-
- Country Code
- us
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- Title Language Code
- en
-
- Place of Publication
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- Pennington, NJ
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- Data Source
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- CiNii Books