Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium

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Bibliographic Information

Title
"Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium"
Statement of Responsibility
editors, F. Roozeboom ... [et al.]
Publisher
  • Electrochemical Society
Publication Year
  • c2003-2004
Book size
24 cm
Series Name / No
  • [I]
  • II

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Notes

Includes bibliographical references and indexes

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