Low-k nanoporous interdielectrics : materials, thin film fabrications, structures and properties

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Bibliographic Information

Title
"Low-k nanoporous interdielectrics : materials, thin film fabrications, structures and properties"
Statement of Responsibility
Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo
Publisher
  • Nova Science Publishers
Publication Year
  • c2010
Book size
23 cm
Other Title
  • Low-k nanoporous interdielectrics : materials, thin film fabrications...

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Notes

Includes bibliographical references (p. [51]-61) and index

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