Low-k nanoporous interdielectrics : materials, thin film fabrications, structures and properties
Bibliographic Information
- Title
- "Low-k nanoporous interdielectrics : materials, thin film fabrications, structures and properties"
- Statement of Responsibility
- Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo
- Publisher
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- Nova Science Publishers
- Publication Year
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- c2010
- Book size
- 23 cm
- Other Title
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- Low-k nanoporous interdielectrics : materials, thin film fabrications...
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Notes
Includes bibliographical references (p. [51]-61) and index
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Details 詳細情報について
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- CRID
- 1130000796890099584
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- NII Book ID
- BB16806750
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- ISBN
- 9781616687496
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- LCCN
- 2010016713
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- Web Site
- https://lccn.loc.gov/2010016713
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- New York
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- Classification
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- LCC: TK7871.15.F5
- DC22: 621.381
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- Subject
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- LCSH: Dielectric films
- LCSH: Microelectronics -- Materials
- LCSH: Porous materials
- LCSH: Interconnects (Integrated circuit technology)
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- Data Source
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- CiNii Books