Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium

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Bibliographic Information

Title
"Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium"
Statement of Responsibility
editors, J. Ruzyllo ... [et al.]
Publisher
  • Electrochemical Society
Publication Year
  • c2002
Book size
24 cm
Other Title
  • Cleaning technology in semiconductor device manufacturing VII

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Notes

Includes bibliographical references and indexes

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Details 詳細情報について

  • CRID
    1130000797151089152
  • NII Book ID
    BA59009371
  • ISBN
    1566773598
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Pennington, N.J.
  • Data Source
    • CiNii Books
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