Soft-x-ray projection lithography : summaries of papers presented at the Soft-X-ray Projection Lithography Topical Meeting, April 6-8, 1992, Monterey, California

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書誌事項

タイトル
"Soft-x-ray projection lithography : summaries of papers presented at the Soft-X-ray Projection Lithography Topical Meeting, April 6-8, 1992, Monterey, California"
責任表示
sponsored by Air Force Office of Scientific Research, Defense Advanced Research Projects Agency, National Science Foundation for the Optical Society of America
出版者
  • Optical Society of America
  • Postconference ed
出版年月
  • c1992
書籍サイズ
28 cm

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注記

Includes bibliographical references and index

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