Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA
Bibliographic Information
- Title
- "Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA"
- Statement of Responsibility
- David Burnett, Shinʾichiro Kimura, Bhanwar Singh, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology, the Electrochemical Society, [and] AVS--American Vacuum Society (USA)
- Publisher
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- SPIE
- Publication Year
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- c2000
- Book size
- 28 cm
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Notes
Includes bibliographical references and index
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Details 詳細情報について
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- CRID
- 1130000797542453632
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- NII Book ID
- BA85986858
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- ISBN
- 0819438421
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- LCCN
- 2002275088
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- Web Site
- https://lccn.loc.gov/2002275088
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Wash., USA
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- Classification
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- LCC: TA1660
- DC21: 621.3815/31
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- Subject
-
- Data Source
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- CiNii Books