Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA

Web Site CiNii Available at 1 libraries

Bibliographic Information

Title
"Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA"
Statement of Responsibility
David Burnett, Shinʾichiro Kimura, Bhanwar Singh, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology, the Electrochemical Society, [and] AVS--American Vacuum Society (USA)
Publisher
  • SPIE
Publication Year
  • c2000
Book size
28 cm

Search this Book/Journal

Notes

Includes bibliographical references and index

Related Books

See more

Details 詳細情報について

Back to top