Metallization : performance and reliability issues for VLSI and ULSI : 12-13 September 1991, San Jose, California
書誌事項
- タイトル
- "Metallization : performance and reliability issues for VLSI and ULSI : 12-13 September 1991, San Jose, California"
- 責任表示
- Gennady S. Gildenblat, Gary P. Schwartz, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
- 出版者
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- SPIE
- 出版年月
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- c1991
- 書籍サイズ
- 28 cm
この図書・雑誌をさがす
注記
"Part of a two-conference program on Rapid Thermal Processing and Metallization held at SPIE's 1991 Symposium on Microelectronic Processing Integration, 9-13 September 1991, in San Jose, California"--P. v
Includes bibliographical references and index
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詳細情報 詳細情報について
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- CRID
- 1130000797670445696
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- NII書誌ID
- BA26308005
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- ISBN
- 0819407275
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- LCCN
- 91067549
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- Web Site
- https://lccn.loc.gov/91067549
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- 本文言語コード
- en
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- 出版国コード
- us
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- タイトル言語コード
- en
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- 出版地
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- Bellingham, Wash.
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- 分類
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- LCC: TK7874
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- データソース種別
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- CiNii Books