Chemical Mechanical Planarization : proceedings of the International Symposium

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書誌事項

タイトル: "Chemical Mechanical Planarization : proceedings of the International Symposium"

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出版年月

シリーズ名/番号

"Dielectric Science and Technology and Electronics Divisions"--on IV T.p

IV:"... held at the 198th Meeting of The Electrochemical Society held in Phoenix, AZ from October 23 to October 25, 2000"--on p. iii

V:"... held at the 201st Meeting of the Electrochemical Society, in Philadelphia, Pennsylvania from May 12th to 17th, 2002" --on p. iii

VI:"... held at the 204th Meeting of the Electrochemical Society, in Orlando, Florida from October 12th to 17th, 2003" --on p. iii

IV: viii, 338 p.

V: vii, 274 p.

VI: vii, 358 p.

Includes bibliographical references and indexes