Semiconductor materials analysis and fabrication process control : proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS Spring Conference, Strasbourg, France, June 2-5, 1992

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Bibliographic Information

Title
"Semiconductor materials analysis and fabrication process control : proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS Spring Conference, Strasbourg, France, June 2-5, 1992"
Statement of Responsibility
edited by G.M. Crean, R. Stuck, and J.A. Woollam
Publisher
  • North-Holland
Publication Year
  • 1993
Book size
29 cm

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Details 詳細情報について

  • CRID
    1130000798022961152
  • NII Book ID
    BA20463173
  • ISBN
    0444899081
  • LCCN
    93155906
  • Web Site
    https://lccn.loc.gov/93155906
  • Text Lang
    en
  • Country Code
    ne
  • Title Language Code
    en
  • Place of Publication
    • Amsterdam
  • Classification
  • Data Source
    • CiNii Books
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