Semiconductor materials analysis and fabrication process control : proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS Spring Conference, Strasbourg, France, June 2-5, 1992
Bibliographic Information
- Title
- "Semiconductor materials analysis and fabrication process control : proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS Spring Conference, Strasbourg, France, June 2-5, 1992"
- Statement of Responsibility
- edited by G.M. Crean, R. Stuck, and J.A. Woollam
- Publisher
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- North-Holland
- Publication Year
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- 1993
- Book size
- 29 cm
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Details 詳細情報について
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- CRID
- 1130000798022961152
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- NII Book ID
- BA20463173
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- ISBN
- 0444899081
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- LCCN
- 93155906
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- Web Site
- https://lccn.loc.gov/93155906
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- Text Lang
- en
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- Country Code
- ne
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- Title Language Code
- en
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- Place of Publication
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- Amsterdam
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- Classification
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- LCC: IN PROCESS
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- Data Source
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- CiNii Books