Integrated circuit metrology, inspection, and process control VI : 9-11 March 1992, San Jose, California
Bibliographic Information
- Title
- "Integrated circuit metrology, inspection, and process control VI : 9-11 March 1992, San Jose, California"
- Statement of Responsibility
- Michael T. Postek, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering
- Publisher
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- SPIE
- Publication Year
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- c1992
- Book size
- 28 cm
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Notes
"Papers presented at the Sixth Annual SPIE Conference on Integrated Circuit Metrology, Inspection, and Process Control, which took place in San Jose, California, 9-12 March 1992"--Introd.
Includes bibliographical references and index
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Details 詳細情報について
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- CRID
- 1130000798187414272
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- NII Book ID
- BA26385990
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- ISBN
- 081940828X
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- LCCN
- 91061053
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- Web Site
- https://lccn.loc.gov/91061053
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Wash., USA
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- Data Source
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- CiNii Books