Integrated circuit metrology, inspection, and process control VI : 9-11 March 1992, San Jose, California
書誌事項
- タイトル
- "Integrated circuit metrology, inspection, and process control VI : 9-11 March 1992, San Jose, California"
- 責任表示
- Michael T. Postek, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering
- 出版者
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- SPIE
- 出版年月
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- c1992
- 書籍サイズ
- 28 cm
この図書・雑誌をさがす
注記
"Papers presented at the Sixth Annual SPIE Conference on Integrated Circuit Metrology, Inspection, and Process Control, which took place in San Jose, California, 9-12 March 1992"--Introd.
Includes bibliographical references and index
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詳細情報 詳細情報について
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- CRID
- 1130000798187414272
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- NII書誌ID
- BA26385990
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- ISBN
- 081940828X
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- LCCN
- 91061053
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- Web Site
- https://lccn.loc.gov/91061053
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- 本文言語コード
- en
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- 出版国コード
- us
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- タイトル言語コード
- en
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- 出版地
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- Bellingham, Wash., USA
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- データソース種別
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- CiNii Books