Reliability, packaging, testing, and characterization of MEMS/MOEMS VI : 23-24 January, 2007, San Jose, California, USA
Bibliographic Information
- Title
- "Reliability, packaging, testing, and characterization of MEMS/MOEMS VI : 23-24 January, 2007, San Jose, California, USA"
- Statement of Responsibility
- Allyson L. Hartzell, Rajeshuni Ramesham, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
- Publisher
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- SPIE
- Publication Year
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- c2007
- Book size
- 28 cm
- Other Title
-
- Reliability, packaging, testing, and characterization of MEMS/MOEMS 6
- Reliability, packaging, testing, and characterization of MEMS/MOEMS six
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Notes
Includes bibliographical references and author index
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Details 詳細情報について
-
- CRID
- 1130003901164100864
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- NII Book ID
- BB3070407X
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- ISBN
- 9780819465764
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- LCCN
- 2007296136
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- Web Site
- https://lccn.loc.gov/2007296136
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Wash.
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- Data Source
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- CiNii Books