Reliability, packaging, testing, and characterization of MEMS/MOEMS VI : 23-24 January, 2007, San Jose, California, USA

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書誌事項

タイトル
"Reliability, packaging, testing, and characterization of MEMS/MOEMS VI : 23-24 January, 2007, San Jose, California, USA"
責任表示
Allyson L. Hartzell, Rajeshuni Ramesham, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
出版者
  • SPIE
出版年月
  • c2007
書籍サイズ
28 cm
タイトル別名
  • Reliability, packaging, testing, and characterization of MEMS/MOEMS 6
  • Reliability, packaging, testing, and characterization of MEMS/MOEMS six

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Includes bibliographical references and author index

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